Kapangidwe ka Makina Yakujambulira Plasma

Vipangizo vya ICP chomenechomene vikuŵa na vigaŵa vinayi: chipinda cha vacuum cha pre -, chipinda cha etching, ndondomeko ya kupereka mpweya na ndondomeko ya vacuum.

(1) Pambere-chipinda chambura kanthu

Ntchito ya chipinda cha pre-vacuum nkhuwoneseska kuti chipinda cha etching chikusungika pa mlingo wakukhazikika wa vacuum, chikukhwaskika yayi na malo gha kuwaro (nga ni fuvu, nthunzi ya maji), ndiposo chikupatura mpweya wakofya kufuma ku chipinda chakutowa. Lili na chibenekelero, manipulator, nthowa yakutumizgirako, chipata chakujipatura, na vinyake.

(2) Chipinda chakupangira

Chipinda cha etching ndicho chigaŵa chikuru cha vipangizo vya ICP vyakujambulira. Iwo ukukhwaska mwaluŵiro mlingo wa kupanga, kuyimilira kwa kupanga, na kukhotakhota. Vigaŵa vikuruvikuru vya chipinda cha etching ni: electrode yapamwamba, ICP pafupipafupi pa wayilesi, RF wayilesi pafupipafupi, dongosolo la electrode lapasi, dongosolo la kulaŵilira kutentha, etc.

(3) Nthowa yakupelekera gasi

Nthowa yakupelekera mpweya njakuti yipeleke mpweya wakupambanapambana wa etching ku chipinda cha etching, na kulaŵilira makora mpweya uwo ukuchimbira na kuchimbira kwizira mu mpweya wakupanikizgika (PC) na mpweya wakuchimbira (MFC). Nthowa yakupelekera gasi yili na botolo la gasi, payipi yakupelekera gasi, nthowa yakulongozgera, chipangizo chakusakanizga, na vinyake.

(4) Nthowa yakufumiskiramo
Pali ndondomeko ziŵiri za vacuum, yimoza ya chipinda cha pre-vacuum ndipo yinyake ya chipinda cha etching. Chipinda cha pre-vacuum chikufumiskika na pampu ya makina. Pa nyengo iyo msinkhu wa vacuum mu chipinda cha pre-vacuum wafika pa mtengo uwo ukaŵikika, ndipo chipata cha kujipatura chingajulika kuti chitumizge wafer. Vacuum mu chipinda cha etching chikuperekeka na pampu ya makina na pampu ya maselo. Mpweya uwo ukupangika na ivyo vikuchitika mu chipinda cha etching ukufumiskikaso na dongosolo la vacuum.